Sarah Choudhury, working as a SWEP-funded summer student at the Nano Fabrication Kingston lab created these images using electron beam lithography and deposition of a thin metal film.
On the engineering facebook page, Sarah writes:
This summer I worked as a SWEP student for NanoFabrication Kingston at Innovation Park. I've been working with some really awesome technology but one of the best things I've done is to make super-tiny logos and designs with the electron beam lithography tool we have here. I made the Sci '21 Year Crest, the Queen's University logo, and the NanoFabrication Kingston logo about one quarter the width of a human hair. The Queen's logo is 67 microns wide, the Sci '21 Year Crest is 40 microns, and the NFK logo is 25 microns. The smallest features within these designs are 18 nanometers across: the cross-hatch in the flower of the Queen's logo, for example.