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MECH 423 Introduction To Microsystems Units: 3.50
This course will deal with the practical engineering aspects of micro-machining technologies and microsystems. The contents will include: scaling issues, microfabrication technologies and production methods, classification and analysis of Microsystems (including microsensors, microactuators, RF switches, micromirrors, and other micromechanisms), the integration of devices into Microsystems (both assembly and interfacing). Micro-machining will be compared and contrasted to both micro-electronics and traditional macro-machining. The development and use of Microsystems simulation and design tools will be covered as well.
NOT OFFERED 2024-2025
(Lec: 3, Lab: 0, Tut: 0.5)
NOT OFFERED 2024-2025
(Lec: 3, Lab: 0, Tut: 0.5)
Offering Term: W
CEAB Units:
Mathematics 0
Natural Sciences 0
Complementary Studies 0
Engineering Science 25
Engineering Design 17
Offering Faculty: Smith Engineering
Course Learning Outcomes:
- Recognize relevant physical laws and exercise them in engineering problems at microscale.
- Recognize semiconductor materials properties and exercise them in micro device design and analysis.
- Distinguish working principles of different micro devices testing techniques and implement these micro devices in various applications.
- Appraise some concurrent microsystem technologies devices through literature review and identify some potential applications for them.
- Identify limitations and benefits of existing micro devices and/or their fabrication technology and propose new design for improvement.