This course introduces sensor fabrication technologies. The topics include various types of sensors' design, fabrication processes, and applications. Students will learn standard micro and nano fabrication and cleanroom processing such as lithography, material deposition methods and systems, wet and dry etching, encapsulation, characterization methods and systems, etc. The effect of design parameters and fabrication processes on the performance of sensors will be discussed. The lab component of the course includes demonstration of the fabrication process in the cleanroom and operation of some sensors.
(Lec: 3, Lab: 0.25, Tut: 0)