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ELEC 345 Sensor Fabrication Technologies Units: 3.25
This course introduces sensor fabrication technologies. The topics include various types of sensors' design, fabrication processes, and applications. Students will learn standard micro and nano fabrication and cleanroom processing such as lithography, material deposition methods and systems, wet and dry etching, encapsulation, characterization methods and systems, etc. The effect of design parameters and fabrication processes on the performance of sensors will be discussed. The lab component of the course includes demonstration of the fabrication process in the cleanroom and operation of some sensors.
(Lec: 3, Lab: 0.25, Tut: 0)
(Lec: 3, Lab: 0.25, Tut: 0)
Offering Term: F
CEAB Units:
Mathematics 0
Natural Sciences 0
Complementary Studies 0
Engineering Science 27
Engineering Design 12
Offering Faculty: Smith Engineering
Course Learning Outcomes:
- Explain the basic transduction mechanisms in different types of sensors.
- Explain the operation of commonly used sensors.
- Explain the different methods and approaches of microfabrication.
- Explain and understand how the design of the sensors affect the performance and operation of those.
- Analyze and identify the appropriate design of different sensors.
- Work collaboratively on team tasks to partially fabricate and test.